Wave field phase calculating method for measuring roughness or forms of e.g. microelectronics surface, involves calculating phase of wavefield on surface according to absence or existence of singularity

摘要

The method involves determining values of intensity of wave field in points of a rectangular surface. Variance of the intensity of the wave field with respect to a coordinate is determined in the points of the surface, where the coordinate is defined along an axis perpendicular to the surface. A singularity function representative of the absence or the existence of a phase singularity is calculated. The singularity function is obtained by a second order Fredholm equation. A phase of the wavefield on the surface is calculated according to the absence or the existence of the singularity. Independent claims are also included for the following: (1) a device for calculating a phase of wave field (2) a computer programmable storage medium comprising a set of instructions for performing a wave field phase calculating method.