发明名称
摘要 PROBLEM TO BE SOLVED: To provide a highly efficient semiconductor near-field light source which can be arrayed and can be manufactured easily, a method for manufacturing the light source, and a near-field optical system using the light source. SOLUTION: A semiconductor near-field light source is constituted by laminating a compound semiconductor layer constituted in a triangular pyramid structure using the regular triangular exposed surface of a compound semiconductor substrate 11 as one face on the exposed surface of the substrate 11 and the triangular pyramid structure has a surface emission type laser structure 12 containing at least a pair of multilayered semiconductor film reflecting mirrors and an active layer laminated in the thickness direction. A very small opening 13 having a size at the level of the oscillating wavelength of the laser 12 is formed near the apex of the triangular pyramid structure and the light oscillated form the laser 12 is introduced to the opening 13 and generates near-field light.
申请公布号 JP4250257(B2) 申请公布日期 2009.04.08
申请号 JP19990133416 申请日期 1999.05.14
申请人 发明人
分类号 H01L21/027;H01S5/30;G01Q60/22;G01Q70/06;G01Q80/00;G02B21/06;H01S5/00;H01S5/183;H01S5/323;H01S5/343 主分类号 H01L21/027
代理机构 代理人
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