发明名称 |
Angled implant for trench isolation |
摘要 |
A trench isolation having a sidewall and bottom implanted region located within a substrate of a first conductivity type is disclosed. The sidewall and bottom implanted region is formed by an angled implant, a 90 degree implant, or a combination of an angled implant and a 90 degree implant, of dopants of the first conductivity type. The sidewall and bottom implanted region located adjacent the trench isolation reduces surface leakage and dark current.
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申请公布号 |
US7514715(B2) |
申请公布日期 |
2009.04.07 |
申请号 |
US20040923943 |
申请日期 |
2004.08.24 |
申请人 |
APTINA IMAGING CORPORATION |
发明人 |
RHODES HOWARD;MOULI CHANDRA |
分类号 |
H01L29/04;H01L;H01L21/00;H01L21/265;H01L21/76;H01L21/762;H01L21/768;H01L21/8238;H01L27/146;H01L31/062 |
主分类号 |
H01L29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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