| 发明名称 |
Pre-oxidization of deformable elements of microstructures |
| 摘要 |
The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present invention can be performed at a variety of stages of the fabrication and packaging processes.
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| 申请公布号 |
US7514012(B2) |
申请公布日期 |
2009.04.07 |
| 申请号 |
US20040766776 |
申请日期 |
2004.01.27 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
DOAN JONATHAN;PATEL SATYADEV R.;SIMONIAN DMITRI |
| 分类号 |
C23F1/00;B44C1/22;B81B7/00;B81C1/00;G02B26/08;H01L21/00 |
主分类号 |
C23F1/00 |
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