发明名称 Semiconductor device, and method and apparatus for inspecting appearance thereof
摘要 A semiconductor device includes a first wiring layer having a first wiring, a second wiring layer having a second wiring formed over the first wiring layer, and a first insulating layer interposed between the first and second wiring layers, wherein the second wiring layer or an upper layer thereof has a fine projection, and the diameter of a circle circumscribing the projection in a plane or sectional view is 40 nm or less.
申请公布号 US7515258(B2) 申请公布日期 2009.04.07
申请号 US20060604676 申请日期 2006.11.28
申请人 SHARP KABUSHIKI KAISHA 发明人 OHMINAMI NOBUYUKI;UMEMOTO TAKESHI
分类号 G01N21/00 主分类号 G01N21/00
代理机构 代理人
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