SYSTEM AND METHOD FOR PREVENTING SUBSTRATE INSPECTION APPARATUS FROM COLLIDING WITH PERIPHERAL OBSTACLE USING ULTRASONIC SENSOR

摘要

A system and a method for preventing collision are provided to automatically reduce a stage moving speed by recognizing a distance by an ultrasonic sensor. A collision preventing sensor is installed in at least one or more position of a substrate inspection device. A distance recognition module(220) calculate a distance value with an surrounding object by using an output of the collision preventing sensor. A motion controller(210) controls a motion of a substrate position of the substrate inspection device according to a control input. The distance value is reflected in the motion of the substrate position. The collision preventing sensor includes an ultrasonic sensor(230). The distance recognition module supplies a plurality of signals to the collision preventing sensor.