| 摘要 |
A piezoelectric actuator includes a first ceramic sheet having an individual electrode formed thereon, a second ceramic sheet having a common electrode formed thereon, a top ceramic sheet having a surface electrode for the individual electrode and a surface electrode for the common electrode formed thereon, wherein the surface electrode for the common electrode is divided by a plurality of slits into a plurality of electrode-portions each having a area of not more than a predetermined area. Accordingly, when these ceramic sheets are calcinated to be integrated together, this construction makes it possible to lower the affect due to difference in the amount of thermal shrinkage between the surface electrode for the common electrode and the top ceramic sheet, thereby suppressing the arching deformation of the top ceramic sheet.
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