发明名称 Two-dimensional moving apparatus
摘要 A piezoelectric oscillator 30 comprises an exterior wall that moves a first urging member urging the exterior wall in a first direction x, and moves a second urging member urging the exterior wall in a second direction y that is perpendicular to the first direction x. The first urging member is moved in the second direction y on the basis of vibration, and the second urging member is moved in the first direction x on the basis of the vibration.
申请公布号 US7514849(B2) 申请公布日期 2009.04.07
申请号 US20060459682 申请日期 2006.07.25
申请人 HOYA CORPORATION 发明人 ICHIKAWA ATSUSHI;SATO MASAYASU
分类号 H01L41/00 主分类号 H01L41/00
代理机构 代理人
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