| 摘要 |
An apparatus for inspecting the fault of the semiconductor material can inspect the fault of the plane surface and bottom surface of material to one folder system at the same time. The inspection apparatus comprises the vision system(100), the folding system(200), and the transport jig(300) and turn table(400). The vision system inspects the top and the lower part. The folding system arranges materials for the exact inspection. The transport jig transfers the material after the vision inspection. The turn-table receives transferred materials. The turn-table arranges the materials and facilitates sorting of the materials.
|
