Method of and system for functionally testing multiple devices in parallel in a burn-in-environment

摘要

A method of and a system for testing semiconductor devices heat a plurality of devices to a burn-in temperature, and perform functional tests in parallel on the plurality of devices at the burn-in temperature. Systems include a burn-in oven and a test multiplexer. The burn-in oven is adapted to receive and heat the devices to the burn-in temperature. The test multiplexer is adapted to apply functional test signals to and receive output signals from the devices in the burn-in oven.