发明名称 |
Method of producing porous silicon particles by stain-etching and silicon nanoparticles from stain-etched silicon powder |
摘要 |
The present invention is for a porous silicon powder comprising silicon particles wherein the outermost layers of said particles are porous. The present invention is also directed to a method of making this porous silicon powder using a stain etch method. The present invention is also directed to a method of making silicon nanoparticles from the porous silicon powders using a process of ultrasonic agitation. The present invention also includes methods of processing these silicon nanoparticles for use in a variety of applications.
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申请公布号 |
US7514369(B2) |
申请公布日期 |
2009.04.07 |
申请号 |
US20070763400 |
申请日期 |
2007.06.14 |
申请人 |
APPLIED NANOTECH HOLDINGS, INC. |
发明人 |
LI YUNJUN;PAVLOVSKY IGOR |
分类号 |
H01L21/461;B32B5/16;B32B5/18;C01B33/02 |
主分类号 |
H01L21/461 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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