发明名称 Method of producing porous silicon particles by stain-etching and silicon nanoparticles from stain-etched silicon powder
摘要 The present invention is for a porous silicon powder comprising silicon particles wherein the outermost layers of said particles are porous. The present invention is also directed to a method of making this porous silicon powder using a stain etch method. The present invention is also directed to a method of making silicon nanoparticles from the porous silicon powders using a process of ultrasonic agitation. The present invention also includes methods of processing these silicon nanoparticles for use in a variety of applications.
申请公布号 US7514369(B2) 申请公布日期 2009.04.07
申请号 US20070763400 申请日期 2007.06.14
申请人 APPLIED NANOTECH HOLDINGS, INC. 发明人 LI YUNJUN;PAVLOVSKY IGOR
分类号 H01L21/461;B32B5/16;B32B5/18;C01B33/02 主分类号 H01L21/461
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