APPARATUS FOR CLEANING GLASS SUBSTRATE

摘要

A substrate cleaning apparatus is provided to prevent the falling of the disk brush by serving the structure of performing the disk brush change operation. A base(1) is used in order to form a frame. A plurality of supporting stands(3,5) are provided to the base. A plurality of disk brushes(7,9) are combined with the supporting stand. The power transmission method delivers the torque of the driving source(M1,M2) to the disk brush. The rotating member is arranged at the base. The substrate is placed on the top of rotating members. A transfer unit(13) transfers the substrate by the driving source.