发明名称 |
Focusing apparatus, focusing method, and inspection apparatus |
摘要 |
A focusing apparatus includes a first sensor and a second sensor configured to receive an optical image of a target workpiece to be inspected and convert it photoelectrically, a first optical system configured to make the optical image be focused on the first sensor, a second optical system configured to branch the optical image from the first optical system and to make a branched optical image be focused on the second sensor, a focus detection part configured to input a first image signal photoelectrically converted by the first sensor and a second image signal photoelectrically converted by the second sensor and to detect a focus position of the optical image by using high frequency components of the first image signal and the second image signal, and a focus control part configured to control a focus of the first optical system based on the focus position detected by the focus detection part.
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申请公布号 |
US7514660(B2) |
申请公布日期 |
2009.04.07 |
申请号 |
US20070754515 |
申请日期 |
2007.05.29 |
申请人 |
NUFLARE TECHNOLOGY, INC. |
发明人 |
IKEDA MASAMI;ENDO SATOSHI |
分类号 |
G02B7/04;G02B7/28;G02B7/36;G03B13/00;G03F1/84;H01L21/027 |
主分类号 |
G02B7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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