TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-READABLE RECORDING MEDIUM, AND TEMPERATURE SETTING APPARATUS OF THERMAL PROCESSING PLATE

摘要

A temperature setting method of thermal processing plate, computer-readable recording medium, and temperature setting apparatus of thermal processing plate are provided to rapidly progress the initiation task of the heating treatment apparatus. The heat processing unit is segmented by a plurality of regions. The temperature of each region of the heat processing unit can be set. The temperature correction of each region of the heat processing unit can be set. For the substrate processed by a thermal process, the in-plane tendency of the current process state of substrate is disassembled to a plurality of in-plane tendency components(S2). The improvable in-plane tendency of the process state of substrate is calculated(S3). The in-plane tendency of the process state after the improvement of substrate is calculated(S4).