| 摘要 |
A method of teaching robot hands according to arranging state of wafers in a wafer moving robot is provided to return steadily the wafer by teaching the substrate mounting part of the substrate conveying robot in the alignment of wafer. The first posture of the substrate mounting part of the wafer-transporting robot is obtained(S400). In the first posture, the first wafer within the wafer cassette is settled in the substrate mounting part. The second posture of the substrate mounting part of the wafer-transporting robot is obtained(S410). In the second posture, the second wafer within the wafer cassette is settled in the substrate mounting part. The third posture of the substrate mounting part of the wafer-transporting robot is calculated by using the first posture and the second posture(S430). In the third posture, the third wafer within the wafer cassette is settled in the substrate mounting part.
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