发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device which can correspond to a reduction in pad size and prevent a deterioration in connection reliability such as short between pins. <P>SOLUTION: Before ultrasonic thermocompression bonding of a metal thin wire 7 to an electrode 2, a deformed metal ball 9a shifted from the center of the metal thin wire 7 is formed by elastically deforming the metal ball 9 formed on the leading end of the metal thin wire 7 by pushing the ball to an inclined surface 12a having an inclined pushing surface and a metal connection portion 10a is formed by performing ultrasonic thermocompression bonding of the deformed metal ball 9a to the electrode 2. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009070930(A) 申请公布日期 2009.04.02
申请号 JP20070236044 申请日期 2007.09.12
申请人 PANASONIC CORP 发明人 SATO MOTOAKI
分类号 H01L21/60 主分类号 H01L21/60
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