TOOL FOR MANUFACTURING HOLLOW CATHODE, ITS MANUFACTURING METHOD, AND HOLLOW CATHODE

摘要

PROBLEM TO BE SOLVED: To form a vapor-deposited carbon film only on an inner surface of a cylinder of a hollow cathode.

SOLUTION: The carbon film is formed only on the inner surface of the cylinder of the hollow cathode member (i) constituted by a conductive rectangular plate-shaped body having an arch-shaped shorter-side upper end, (ii-1) opened toward a longer-side face (ii) along the longer-side face of the rectangular plate-shaped body and (ii-2) closed at one end or the hollow cathode member with a connection terminal formed on the outer bottom of the cylinder closed at one end, using a tool having a member housing hole for housing the member in a sealed state formed vertically in its longer-side face.

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