| 摘要 |
PROBLEM TO BE SOLVED: To provide a static eliminator with layout versatility improved and capable of quickly and surely supplying ion to an object, while preventing adhesion of impurities to an electrode needle. SOLUTION: Air guided in from an air guide tube 50 is guided to air channels 81a of a plurality of flow-channel forming units 81 through air channels 801a, 831a of end units 80, 83. Air guided to the air channels 81a is guided to an air supply space 822 of each nozzle unit 82, through communication channels 813a of the flow-channel forming units 81 and communication channels 822a of the nozzle units 82. Then, the air is blasted downward from an air blast hole 82b of each nozzle unit 82. COPYRIGHT: (C)2009,JPO&INPIT
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