SYSTEMS AND METHODS OF PREPARING A COMPOSITION USED IN MULTIPLE PROCESSING TOOLS

摘要

There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for "one pass" blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.