| 摘要 |
PROBLEM TO BE SOLVED: To improve observation performance and operation performance of an electron microscope. SOLUTION: The electron microscope has: a specimen stage for making a specimen incline; a camera for taking an electron microscope image of the specimen; a monitor for displaying the electron microscope image of the specimen; and a domain means for calculating a domain in which the electron microscope image does not become blurred, wherein the monitor displays the domain in which the electron microscope image does not become blurred. Furthermore, the electron microscope has a field-of-view deviation detecting means for determining presence or absence of field-of-view deviation and a field-of-view deviation correcting means for correcting the field-of-view deviation. COPYRIGHT: (C)2009,JPO&INPIT
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