| 摘要 |
PROBLEM TO BE SOLVED: To provide a static eliminator capable of quickly and surely supplying ion to an object, while preventing adhesion of impurities to an electrode needle. SOLUTION: With an air supply module 300 in a state fitted to the static eliminator 100, air blast holes 32b, 33b of air supply units 32, 33 are arranged so as to pinch each cap 20. In particular, four air blast holes 32b or four air blast holes 33b are arranged at one side and the other side of each cap 20. Further, openings of the air blast holes 32b, 33b are extended up to nearly the same height as the tip parts of the caps 20. Air is blasted downward through these air blast holes 32b, 33b. COPYRIGHT: (C)2009,JPO&INPIT
|
