| 摘要 |
PROBLEM TO BE SOLVED: To observe fine irregularities in a circumferential direction, which are unobservable by an inspection method for irradiating an inspection object with a parallel linear light source for the purpose of heightening sensitivity to irregularities in the circumferential direction, in an inspection method by a line sensor for generating a lightness difference by arranging the linear light source slantingly with respect to the cylindrical inspection object. SOLUTION: In this surface defect inspection method for acquiring a surface image, while rotating the cylindrical inspection object, the inspection object is irradiated with linear light from the linear light source arranged slantingly with respect to the center axis of the inspection object, and the surface image is acquired by an imaging means arranged approximately in parallel with reflected light thereof, and a surface defect is detected by performing image processing of the surface image. Inspection light is irradiated through a cylindrical lens arranged between the linear light source and the inspection object, and a light quantity variation in the circumferential direction on the inspection object surface is enlarged. COPYRIGHT: (C)2009,JPO&INPIT
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