HYDROGEN GENERATION

摘要

An apparatus and method for storage and dispensing of gaseous hydrides. The apparatus includes storage and dispensing vessel (110) which contain a solid phase physical sorbent medium for sorption of gaseous hydrides. The gaseous hydrides are decomposed in a decomposition vessel (120) to generate hydrogen gas which is separated through a membrane (126). The gaseous hydrides include silane, germane, stibine and diborane.