,申请号JP20060518200-传众专利搜索

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发明名称
摘要
申请公布号	JP2009513818(A)	申请公布日期	2009.04.02
申请号	JP20060518200	申请日期	2004.06.25
申请人		发明人
分类号	C23C14/34;H01J37/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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