X-RAY LINE SENSOR MODULE AND X-RAY FOREIGN MATERIAL INSPECTING APPARATUS

摘要

In an x-ray foreign material inspecting apparatus having a foreign material of 2mm or larger as one of the main target inspecting foreign materials, an x-ray line sensor module (14) is provided with a plurality of photodiodes (14a) to improve inspection accuracy of foreign materials. The x-ray line sensor module (14) is a module for detecting intensity of transmission x-ray transmitted through an article containing foreign materials. The photodiodes (14a) are arranged along a first direction orthogonally intersecting with the transfer direction of a conveyer (12), and output a detection signal in accordance with the intensity of the transmission x-ray. An element width, i.e., a length along the first direction of the photodiode (14a), is the size of the foreign material or longer.