| 摘要 |
In a batch cleaning apparatus having a one-bath-type cleaning tank, control is performed such that an average temperature of cleaning liquid in the cleaning tank is uniform among different batches. The one-bath-type cleaning tank has a megasonic oscillator for cleaning objects to be cleaned. A control computer controls the supply temperature of pure water supplied from a pure water heating device to dilute chemical solution so that variation in solution temperature occurring during application of megasonic waves is compensated. The objects to be cleaned are cleaned with an average solution temperature kept at a fixed level for all the batches, while maintaining a high cleaning efficiency.
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