SUBSTRATE SUPPORT SYSTEM AND METHOD

摘要

The present invention includes a substrate support system that features a chuck body (58) having a body surface with a pin (61) extending therefrom having a contract surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. As a result the substrate support system attenuates if not avoids generating non-planarity in a substrate (32) th results from a presence of particulate contaminants. This is achieved by fabricating the pin to be compliant, allowing the same to move to accommodate the presence of the particle while maintaining sufficient planarity in the substrate.