DETECTION SENSOR

摘要

It is an object to provide a technology that can make a vibrator high in sensitivity. If the ratio (Rb/Ra) of an inside diameter (Ra) to an outside diameter (Rb) of a vibrator (20) is appropriately selected, there may be an immobile point where an (r) displacement component (U(Ra) or U(Rb)) in the radial direction or an (r) displacement component (V(Ra) or V(Rb)) in the tangential direction in the outside diameter portion or inside diameter portion of the vibrator (20) is null. In that case, the vibrator (20) is supported with a holding member (22) comprised of a single span beam set in such a way that a boundary condition on a side of thevibrator (20) is set to be pinned while a boundary condition on a side of an anchor to support the vibrator (20) is set to be clamped, so that such support prevents vibration energy of the vibrator (20) from losing through the holding member (22) and avoids a condition to disturb a vibration mode, thereby making a sensor high in sensitivity.