| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase production efficiency of a color filter for liquid crystal and to enhance yield. <P>SOLUTION: A black matrix 10 is formed on a transparent substrate 3 and a color microfilter 12 is formed thereon in such a way that it partially overlaps the black matrix. A cross-sectional shape of the black matrix 10 is regulated so that a large protrusion is not formed at the overlaps and deterioration of the light blocking effect and film peeling at edges of the black matrix are avoided. For this regulation, prebake temperature and conditions in development processing after pattern exposure are set so that undercut parts having a proper depth and length are formed in a thin film material layer before post-bake. <P>COPYRIGHT: (C)2009,JPO&INPIT |
