发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To easily cut an adhesive sheet by using a holding frame in an optimum shape according to the shape of a structure to be segmented into individual pieces. SOLUTION: The manufacturing method includes a process of segmenting a multi-pattern wiring substrate (substrate) 20 into individual pieces. The process for the segmentation into the individual pieces includes: a step of arranging the multi-pattern wiring substrate 20 inside a holding frame 35 in predetermined position relation after preparing the holding frame 35; a step of fixing the holding frame 35 and multi-pattern wiring substrate 20 by sticking the adhesive sheet 40; and a step of cutting the adhesive sheet 40 on the surface side of the holding frame 35 where the adhesive sheet 40 is stuck. Here, a groove 38 is formed on the surface of the holding frame 35 where the adhesive sheet 40 is stuck, and the adhesive sheet 40 is cut along the groove 38 in the step of cutting the adhesive sheet 40. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009071083(A) 申请公布日期 2009.04.02
申请号 JP20070238655 申请日期 2007.09.14
申请人 RENESAS TECHNOLOGY CORP 发明人 SUZUKI TAKESHI;KOBAYASHI YOSHIHIKO
分类号 H05K3/00 主分类号 H05K3/00
代理机构 代理人
主权项
地址