| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an array substrate which can be easily manufactured and can improve the yield of manufacturing. SOLUTION: A plurality of first wirings, a plurality of second wirings, a plurality of switching elemental devices, a plurality of pixel sections with a plurality of pixel electrodes and a plurality of supplemental capacitive elements, a switching circuit, a plurality of first inspection pads, and a plurality of second inspection pads are formed on a substrate. The second wirings are connected to the second inspection pads, electric charge is charged to the pixel sections, an electron beam is radiated to the pixel electrodes of the pixel sections, and information of second electrons discharged from the pixel electrodes are detected to inspect if there are any defects of the pixel sections. COPYRIGHT: (C)2009,JPO&INPIT
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