| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical modulator which has high-performance optical modulation characteristics and is improved with respect to stability. SOLUTION: The optical modulator includes: a substrate 1 which has an electro-optical effect and has an approximately flat surface; a buffer layer 2 formed on the substrate: a traveling wave electrode 4 which is disposed above the buffer layer and includes a center conductor 4a and grounding conductors 4b and 4c; and at least one optical waveguide 3b at least below or near the center conductor. The grounding conductor has thick portions 4b<SP>(4)</SP>and 4b<SP>(6)</SP>and a thin portion 4b<SP>(5)</SP>, and the thick portions are connected to each other by the thin portion, and a portion 11 lacking a conductor is provided in the thin portion, and the thin portion is formed so as to be closer to the surface of the substrate than top surfaces of thick grounding conductors. COPYRIGHT: (C)2009,JPO&INPIT
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