| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly precise angle measuring method and angle measuring device excluding variation of tilt angle of the surface of an object to be measured following posture variation and stage movement of the measuring device accompanying a lapse of time. SOLUTION: The object to be measured is set to a measured object holder that is installed on a measurement stage and has rigidity, the measured object holder has an optical window, and the object to be measured has a measurement reference section. The object to be measured is irradiated with light for measurement through the optical window, the object to be measured at a first position and the tilt angle of the optical window surface are measured and the differenceΔθ<SB>1</SB>is calculated in a measurement visual field of an optical measurement unit for measuring the measured object surface and the tilt angle of the optical window surface, the measurement reference section surface at a second position that is within a movable range of the object to be measured and the measurement visual field and the tilt angle of the optical window surface are measured and the differenceΔθ<SB>2</SB>is calculated, the tilt angleΔθof the measured object surface at the first position with reference to the tilt of the optical window and the measurement reference section surface is determined based on the difference values ofΔθ<SB>1</SB>andΔθ<SB>2</SB>. COPYRIGHT: (C)2009,JPO&INPIT
|
