| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanical isolator suitable to transfer analog signals without previously converting them into digital signals, smaller as a whole device, inexpensive, quickly responsive and reliable. SOLUTION: The micro electromechanical system (MEMS) analog isolator 10 comprises a sensor with a comb electrode mounted on a beam for detecting the operation of a beam 20. The beam itself is electrically insulated between an actuator with a comb electrode and the sensor. The beam is supported operably along a vertical axis 40 by a flexible arm 46. COPYRIGHT: (C)2009,JPO&INPIT
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