VAPOUR DELIVERY SYSTEM

摘要

A delivery system (10) for delivering species to a processing chamber (14) for imparting a desired surface property to one or more large items - such as shoes - comprises: a first container (16) for filling with liquid species; a second container (18) for receiving liquid species from the first container (16); a first flow control means (20) for controlling a volume of liquid species which is allowed to flow from the first container to the second container (18); evaporation means (30) for evaporating liquid species in the second container; and a second flow control means (38) for controlling flow of evaporated species from the second container (18) to a processing chamber (14).