| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the occurrence of cracks by plasma. <P>SOLUTION: The condensation of a pulse laser beam is controlled in a way that the energy density of the pulse laser beam is lower on the front side surface in the direction of the laser irradiation of a mother board W than the energy density generated by the plasma in the atmosphere. This prevents the plasma from being generated on the surface of the mother board W and prevents cracks from taking place. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
