| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To minimize an affect with respect to room pressures of a reference room such as passage and another room when a door of an object room is opened. <P>SOLUTION: The room pressure control device is provided with room pressure adjusting dampers 7-3, 7-9, 8-3, 8-9 installed per room, a door sensor 3-3 detecting opening and closing of the door, a controller 10 controlling the room pressure adjusting damper 8-3 of a clean room R-3 to carry out pressure reduction of a room pressure of the clean room R-3 to a predetermined value at the time of door opening when a door opening signal is outputted from the door sensor 3-3 indicating that operation to open the door 1-3 between a passage HW being the reference room and the clean room R-3 has started, and a door driving mechanism 4-3 driving the door 1-3 and opening it after the room pressure of the clean room R-3 has reached to predetermined value at the time of door opening. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
