| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film thermal diffusivity measuring device of a surface heating/surface temperature measuring type, into which an analysis model that takes into consideration the film thickness is incorporated. SOLUTION: When the surface of a thin film 2 formed on a substrate 1 is heated instantaneously by using heating pulsed light 3, such as, laser pulsed beam to the substrate 1, the surface temperature rises instantaneously. Then, the heat diffuses to the inside of the thin film 2 and penetrates into the substrate 1, and the surface temperature of the thin film 2 is attenuated. Temperature-measuring pulsed light 4 (P2) is irradiated to the same domain as for the heating pulsed light 3 (P3). Light intensity of its reflected light (4b) changes slightly, depending on the surface temperature of the thin film 2. The intensity of the reflected light is detected by a detector 5, and the temperature change of the thin film 2 surface is detected. The detector 5 is equipped with a light intensity sensor 5a for measuring the intensity of the reflected light, and an information processing device 5b for determining and recording the actual temperature and its change, based on a signal from the light intensity sensor 5a. An operation part for calculating a thermal diffusivity of the thin film from the analysis model that takes into consideration the film thickness is integrated into the information processing device. COPYRIGHT: (C)2009,JPO&INPIT
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