| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for inspecting a mask which enables the easy detection of a microcrack or strain, and to provide a method of manufacturing an electrooptical device. SOLUTION: The method includes a step of arranging a mask 1 and a glass substrate 12 in opposed relationship through a gap and transmitting monochromatic light through the glass substrate 12 to irradiate the mask 1 with it, and a step of discriminating the quality of the mask 1 on the basis of the interference fringe pattern formed between the mask 1 and the glass substrate 12. COPYRIGHT: (C)2009,JPO&INPIT
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