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发明名称
摘要
申请公布号	JP4248929(B2)	申请公布日期	2009.04.02
申请号	JP20030135497	申请日期	2003.05.14
申请人		发明人
分类号	G01T1/00;G03B42/04;G01T1/24;G01T1/29;G01T7/00;G03B42/02;H01L31/09	主分类号	G01T1/00
代理机构		代理人
主权项
地址

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