| 摘要 |
<P>PROBLEM TO BE SOLVED: To effectively take anti-heat measures of an electronic apparatus in a vacuum chamber with respect to an exposure device that carried out exposure in a vacuum atmosphere and the electronic apparatus used in the vacuum atmosphere. <P>SOLUTION: The exposure device irradiates a body with exposure light in a space evacuated almost to a vacuum, wherein the device includes: the vacuum chamber which can be evacuated almost to a vacuum; and a local medium mechanism interposing a medium between a local area in the vacuum chamber and the outside of the vacuum chamber. The electronic apparatus includes a substrate stored in a container and is used in the vacuum space, wherein the electronic apparatus further includes: an electronic element disposed on the substrate; and a heat conductive substance thermally connecting the electronic element and container to each other. <P>COPYRIGHT: (C)2009,JPO&INPIT |
