| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical integrator, capable of uniforming an illumination distribution on an irradiated surface by suppressing the influence due to the difference in surface shape of each refractive surface, when it is applied to, for example, an illumination optical system that illuminates the surface to be illuminated. <P>SOLUTION: The wavefront separating type optical integrator (9) is provided with a plurality of refractive surfaces (9ab, 9bb) disposed one- or two-dimensionally, and at least one diffractive optical surface (9d), formed on a region (9c) between the plurality of refractive surfaces (9bb) adjacent to each other in the plurality of refractive surfaces. <P>COPYRIGHT: (C)2009,JPO&INPIT |
