| 摘要 |
PROBLEM TO BE SOLVED: To facilitate formation of a reflection mirror for optical transmission, and to structure an optical waveguide, in forming the optical waveguide as an extension of manufacturing an electric circuit board. SOLUTION: A method includes the steps of: forming a lower cladding layer (30) by providing an opening (28) in an insulation layer (23) and exposing a conduction layer (27); forming a plating resist layer (31) on the insulation layer including the lower cladding layer; performing electrolytic plating using, as the electrode, the conduction layer (27) connected to the outside; filling, with Cu, openings (31a, 31b) penetrating the surface insulation layer, the lower cladding layer and the plating resist layer; removing the plating resist layer to form a protrusion (32) with the filled Cu; machining the protrusion into a slope (34) to form an Au mirror face (36) on the slope; and laminating a core layer (37) and an upper cladding layer (38). COPYRIGHT: (C)2009,JPO&INPIT |
