| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of evaluating an electrostatic latent image that enables evaluation excluding a case that actual image formation is difficult and a latent image is extremely shallow and that ensures high noise resistance. SOLUTION: The method includes the steps of: scanning the pattern formation face of a photoconductive sample with a charged particle beam, the pattern formation face having an electrostatic latent image pattern formed by charging and exposing an optical image; trapping charged particles electrically affected by the electrostatic latent image pattern, and then detecting its intensity signal so that it corresponds with a position on the pattern formation face; extracting an cross-sectional profile from the detected intensity signal, the profile containing the electrostatic latent image pattern; extracting a feature vector from the intensity signal of a non-exposure part in the cross-sectional profile; and calculating the latent image resolution of the photoconductive sample. In the electrostatic latent image evaluation method, the light distribution of a certain cross-section of the optical image is a light distribution of a cross-section that has a periodic change in the value of the quantity of light. Based on the predetermined reference quantity and the feature vector, which is the maximum value of the intensity signal of the non-exposure part in the cross-sectional profile, the latent image resolution is calculated. COPYRIGHT: (C)2009,JPO&INPIT
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