| 摘要 |
PROBLEM TO BE SOLVED: To solve the problematic point such as the development of the scattering of droplet discharge characteristics due to the lowering of the pressure resistance between a diaphragm electrode layer and a fixed electrode layer at a portion, in which sacrificial layer grooves are formed, on the fixed electrode layer, in a structure, in which gaps are formed by etching a sacrificial layer. SOLUTION: In the constitution that a fixed electrode layer 12 for forming fixed electrodes 12a, a sacrificial layer 14 for forming gaps and a variable electrode layer 23 for forming variable electrodes 23a are laminated to one another in the order named so as to form gaps 14a by removing a sacrificial layer 14 lying between the fixed electrode 12a and the variable electrode 23a, neither variable electrode 23a nor variable electrode layer 23 exists on the fixed electrode layer 12 at the portion 71 of a sacrificial layer separating groove separating the sacrificial layer 14 in response to the respective gaps 14a. COPYRIGHT: (C)2009,JPO&INPIT
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