<p>A delivery system (10) for delivering species (12) to a processing chamber (14), so as to coat the surface of a large item, thereby imparting specific properties thereto, comprises: a species container (16) for containing species supplied from a source (18) of liquid species; evaporation means (20) for evaporating liquid species in said container; flow guide means (22, 24) for guiding flow of evaporated species to a processing chamber; and monitoring means (28) for measuring a rate over time of evaporation of species from said container so that flow of evaporated species delivered to said processing chamber can be monitored.</p>
申请公布号
WO2009040536(A1)
申请公布日期
2009.04.02
申请号
WO2008GB03257
申请日期
2008.09.25
申请人
P2I LIMITED;COULSON, STEPHEN, RICHARD;KING, CHARLES, EDMUND