发明名称 ADHESIVE TAPE
摘要 PROBLEM TO BE SOLVED: To provide an adhesive tape which has sufficient an adhesive force to a pasted object, can remove foreign substances of sub-micron level without causing contamination in a cleaning portion, is excellent in heat resistance, exhibits sufficient adhesive force and coagulation force even at a high temperature, and can be easily peeled off without causing remaining adhesive when being peeled off from the pasted object after being used. SOLUTION: In this adhesive tape, an aggregation layer of oblique columnar structures each protruding with an elevation angle of <90°from the surface of a supporter is provided on the surface of the supporter, wherein the oblique columnar structures each have an aspect ratio of≥1. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009070883(A) 申请公布日期 2009.04.02
申请号 JP20070235130 申请日期 2007.09.11
申请人 NITTO DENKO CORP 发明人 TERADA YOSHIO;KAWAZOE SHOZO;YOSHIDA YOSHITOKU
分类号 H01L21/304;B08B1/00;C09J7/02 主分类号 H01L21/304
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