| 摘要 |
PROBLEM TO BE SOLVED: To surely suppress the generation of the air hammering due to the compressibility of air. SOLUTION: The spindle 14 is rotatably supported by a housing 12 via porous air bearings 26, 28. The spindle 14 is connected to the rotary shaft 44 of an electric motor 38 via a flange 18. Air passages 30, 32 are formed in the housing 12 so as to discharge the air, which is introduced from an inlet port 34, from an outlet port 36 via the porous air bearings 26, 28. The porous air bearings 26, 28 are configured by integrating a radial bearing with a thrust bearing. Air discharging passages 54, 56 for introducing the air flowing through the thrust receiving surfaces 26b, 28b of the porous air bearings 26, 28 and for introducing the air outside the bearing, and throttles 58, 60 for adjusting the flow rate of the air passing through the air discharging passages 54, 56, are formed in the porous air bearings 26, 28. COPYRIGHT: (C)2009,JPO&INPIT
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