| 摘要 |
PROBLEM TO BE SOLVED: To provide a rugged sheet for measuring very low pressure or its distribution, the pressure being equal to or less than the measurement lowest limit of a material for pressure measurement. SOLUTION: This rugged sheet 70 for measuring pressure by being used together with the material 64 for pressure measurement comprises a plurality of projection parts 74 made of hard resin on a base part 72 of 0.05 mm or more in thickness, the projection parts 74 each having an exposed face parallel to the base part, and has an overall thickness of 0.5 mm or less. A relation, S = (L×L)/R, is satisfied, where S is the area of the exposed face, L is space between the plurality of projection parts, and R is the ratio of the pressure measurement lowest limit of the material to a pressure measurement lowest limit in measuring pressure by together using the rugged sheet and the material. COPYRIGHT: (C)2009,JPO&INPIT
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