发明名称 Display device having thin film semiconductor device and manufacturing method of thin film semiconductor device
摘要 A display device having a thin film semiconductor device including a semiconductor thin film having first and second semiconductor regions formed each into a predetermined shape above an insulative substrate, a conductor fabricated into a predetermined shape to the semiconductor thin film and a dielectric film put between the semiconductor thin film and the conductor, in which the semiconductor thin film is a polycrystal thin film with the crystallization ratio thereof exceeding 90% and the difference of unevenness on the surface of the semiconductor thin film does not exceed 10 nm.
申请公布号 US2009085042(A1) 申请公布日期 2009.04.02
申请号 US20080219837 申请日期 2008.07.29
申请人 HITACHI DISPLAYS, LTD. 发明人 MINE TOSHIYUKI;TAI MITSUHARU;SHIMA AKIO
分类号 H01L21/20;H01L29/04 主分类号 H01L21/20
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